Structural, Magnetic and Gas Sensing Activity of Pure and Cr Doped In2O3 Thin Films Grown by Pulsed Laser Deposition

نویسندگان

چکیده

Pure In2O3 and 6% Cr-doped thin films were prepared on a silicon (Si) substrate by pulsed laser deposition technique. The obtained In2O3/In2O3:Cr structural, morphological, optical, magnetic gas sensing properties briefly investigated. X-ray diffraction results confirmed that the grown are in single-phase cubic bixbyte structure with space group Ia-3. SEM analysis showed formation of agglomerated spherical shape morphology decreased average grain size for Cr doped film compared to pure film. It is observed shows lower band gap energy corresponding transmittance around 80%. photoelectron spectroscopy measurements revealed presence oxygen vacancy These defects could play significant role enhance performance towards chemical species. In hysteresis loop, it clear confirm ferromagnetic behaviour maximum saturation value 39 emu/cc NH3 studies was also carried out at room temperature both films, higher sensitivity 182% In2O3, which about nine times than due surface.

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ژورنال

عنوان ژورنال: Coatings

سال: 2021

ISSN: ['2079-6412']

DOI: https://doi.org/10.3390/coatings11050588